Fabrication of Sub-10 nm Metallic Lines of Low Line-Width Roughness by Hydrogen Reduction of Patterned Metal-Organic Materials

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Publication year
2010
Author(s)
Nedelcu, M.
Saifullah, M.S.M.
Hasko, D.G.
Jang, A.
Anderson, D.
Huck, W.T.S.
Jones, G.A.C.
Welland, M.E.
Kang, D.J.
Steiner, U.
Number of pages
7 p.
Source
Advanced Functional Materials, 20, 14, (2010), pp. 2317-2323
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DOI
Publication type
Article / Letter to editor
Please use this identifier to cite or link to this item: https://hdl.handle.net/2066/83578   https://hdl.handle.net/2066/83578
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