Wet chemical etching of silicon {111}: Etch pit analysis by the Lichtfigur method

Thumbnail
Fulltext:
75553.pdf
Size:
1.712Mb
Format:
PDF
Description:
Publisher’s version
Download
Publication year
2009
Author(s)
Shah, I.A.
Wolf, B.M.A. Van der
Enckevort, W.J.P. van
Vlieg, E.
Number of pages
7 p.
Source
Journal of Crystal Growth, 311, 5, (2009), pp. 1371-1377
ISSN
DOI
Publication type
Article / Letter to editor
If a DOI or any other persistent identifier is unavailable, please use the following repository identifier to link to this item: https://hdl.handle.net/2066/75553   https://hdl.handle.net/2066/75553
Display more details

Upload full text

Use your RU credentials (u/z-number and password) to log in with SURFconext to upload a file for processing by the repository team.