HF species and Dissolved oxygen on the epitaxial lift-off process of GaAs using AlAsP Release Layers

Find Full text
Thumbnail
Fulltext:
70120.pdf
Embargo:
until further notice
Size:
369.5Kb
Format:
PDF
Publication year
2008
Author(s)
Niftrik, A.T.J. van
Schermer, J.J.
Bauhuis, G.J.
Mulder, P.
Larsen, P.K.
Setten, M.J. van
Attema, J.J.
Tan, N.C.G.
Kelly, J.J.
Number of pages
5 p.
Source
Journal of the Electrochemical Society, 155, 1, (2008), pp. D35-D39
ISSN
DOI
Publication type
Article / Letter to editor
Please use this identifier to cite or link to this item: https://hdl.handle.net/2066/70120   https://hdl.handle.net/2066/70120
Display more details

Upload full text

Use your RU credentials (u/z-number and password) to log in with SURFconext to upload a file for processing by the repository team.