Model Checker Aided Design of a Controller for a Wafer Scanner

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Title:	Model Checker Aided Design of a Controller for a Wafer Scanner
Author(s):	Hendriks, M. ; Nieuwelaar, N.J.M. van den; Vaandrager, F.W.
Publication year:	2004
Publisher:	[S.l.] : NIII, University of Nijmegen
Number of Pages:	16 p.
Series:	Technical Report ; NIII-R0430
Publication type:	External research report
Please use this identifier to cite or link to this item : https://hdl.handle.net/2066/60423
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Subject:	Informatics for Technical Applications
Organization:	Informatics for Technical Applications

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