In situ observations on amorphous versus crystalline growth of silicon by chemical vapour deposition

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Publication year
1985
Author(s)
Bloem, J.
Beers, A.M.
Source
Thin Solid Films, 124, 2, (1985), pp. 93-100
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Publication type
Article / Letter to editor
Please use this identifier to cite or link to this item: https://hdl.handle.net/2066/309384   https://hdl.handle.net/2066/309384
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