The epitaxial Lift-Off Process: Parameter Studies and Solar Cell Application
In case you object to the disclosure of your thesis, you can contact firstname.lastname@example.org
[S.l. : s.n.]
Number of pages
XII, 145 p.
RU Radboud Universiteit Nijmegen, 8 september 2004
Promotor : Larsen, P.K. Co-promotor : Schermer, J.J.
Display more detailsDisplay less details
Applied Materials Science
SubjectApplied Materials Science
The epitaxial lift-off (ELO) process is a technique that allows the separation of a single crystalline film from the substrate it was deposited on via the etching of an intermediate AlAs release layer. For this purpose, the extreme selectivity of hydrofluoric acid (HF) for AlAs over GaAs is employed. The technique has a large potential for optoelectronic applications, because it can lead to several benefits. Among these are cost reduction via a substrate reuse, increased power output of devices because of better cooling capabilities and the integration of III/V based devices with silicon circuitry. ELO, however, can only be implemented on an industrial scale in device processing if the rate at which substrate and epilayers are separated is sufficiently high. The lateral etch rate of the process has therefore been under serious investigation during the last years. In the present thesis several of the relevant process parameters have been investigated, leading to a better understanding of the process. Furthermore, the area of the released devices and the etch rate at which this occurs have increased dramatically. In order to show that epitaxial lift-off does not have a negative effect on devices that are subjected to the procedure, ELO solar cells are compared to identical structures that are fabricated while they are still on their substrate. It was found that the ELO solar cells show some extra benefits, which enables them to even outperform the expensive substrate cells
Upload full text
Use your RU credentials (u/z-number and password) to log in with SURFconext to upload a file for processing by the repository team.