Etching AlAs with HF for epitaxial lift-off applications

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Publication year
2004
Author(s)
Voncken, M.M.J.
Schermer, J.J.
Niftrik, A.T.J. van
Bauhuis, G.J.
Mulder, P.
Larsen, P.K.
Peters, T.P.J.
Bruin, B. de
Klaassen, A.
Kelly, J.J.
Source
Journal of the Electrochemical Society, 151, (2004), pp. G347-G352
ISSN
DOI
Publication type
Article / Letter to editor
Please use this identifier to cite or link to this item: https://hdl.handle.net/2066/112601   https://hdl.handle.net/2066/112601
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