Arsenic Formation on GaAs during Etching in HF Solutions: Relevance for the Epitaxial Lift-Off Process

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Publication year
2013
Author(s)
Smeenk, N.J.
Engel, J.
Mulder, P.
Bauhuis, G.J.
Bissels, G.
Schermer, J.J.
Vlieg, E.
Kelly, J.J.
Source
ECS Journal of Solid State Science and Technology, 2, 3, (2013), pp. P58-P65
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Publication type
Article / Letter to editor
Please use this identifier to cite or link to this item: https://hdl.handle.net/2066/112596   https://hdl.handle.net/2066/112596
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