TEMPERATURE-DEPENDENCE OF SILICON DOPING OF GAAS BY SIH4 AND SI2H6 IN ATMOSPHERIC-PRESSURE METALORGANIC CHEMICAL VAPOR-DEPOSITION
Publication year
1989Source
Journal of Crystal Growth, 98, 3, (1989), pp. 249-254ISSN
Publication type
Article / Letter to editor
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Organization
Applied Materials Science
Journal title
Journal of Crystal Growth
Volume
vol. 98
Issue
iss. 3
Page start
p. 249
Page end
p. 254
This item appears in the following Collection(s)
- Non RU Publications [15790]
- Open Access publications [108998]
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