SI-DOPING OF MOCVD GAAS - CLOSER ANALYSIS OF THE INCORPORATION PROCESS

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Publication year
1989
Author(s)
Tang, X.
Lochs, H.G.M.
Hageman, P.R.
Decroon, M.H.J.M.
Giling, L.J.
Bons, A.J.
Source
Journal of Crystal Growth, 98, 4, (1989), pp. 827-837
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DOI
Publication type
Article / Letter to editor
Please use this identifier to cite or link to this item: https://hdl.handle.net/2066/112594   https://hdl.handle.net/2066/112594
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