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| Title: | Anodic etching of SiC in alkaline solutions |
| Author(s): | Dorp, D.H. van
Weyher, J.L. (305358316)
Kelly, J.J. (304829129)
Micromech, J. |
| Publication year: | 2007 |
| Document type: | Article / Letter to editor |
| Journal: | Journal of micromechanics and microengineering : structures, devices, and systems |
| ISSN: | 0960-1317 |
| Volume: | vol. 17 |
| Issue: | iss. 4 |
| Start page: | p. 50 |
| End page: | p. 55 |
| Subject: | Applied Materials Science |
| Organization: | Applied Materials Science |
| Appears in Collections: | Academic bibliography
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Please use this identifier to cite or link to this item:
http://hdl.handle.net/2066/35127
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