Publication year
2007Publisher
Boca Raton : CRC Press;Taylor & Francis
ISBN
1574446754
In
Nishi, Y. (ed.), Handbook of Semiconductor Manufacturing Technology, pp. 366-368Publication type
Part of book or chapter of book
Display more detailsDisplay less details
Editor(s)
Nishi, Y.
Organization
Applied Materials Science
Book title
Nishi, Y. (ed.), Handbook of Semiconductor Manufacturing Technology
Page start
p. 366
Page end
p. 368
Subject
Applied Materials ScienceThis item appears in the following Collection(s)
- Academic publications [238441]
- Faculty of Science [34986]
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