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| Title: | Defect-selective etching of semiconductors |
| Author(s): | Weyher, J.L. (305358316)
Kelly, J.J. (304829129)
Doering, Robert
Nishi, Yoshio |
| Publication year: | 2007 |
| Document type: | Article in monograph or in proceedings |
| Book title: | Handbook of semiconductor manufacturing technology |
| ISBN: | 1574446754
9781574446753 |
| Start page: | p. 366 |
| End page: | p. 368 |
| Publisher: | Boca Raton : CRC/Taylor & Francis |
| Subject: | Applied Materials Science |
| Organization: | Applied Materials Science |
| Appears in Collections: | Academic bibliography
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Please use this identifier to cite or link to this item:
http://hdl.handle.net/2066/34899
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