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| Title: | Electrochemistry and etching of wide bandgap chemically resistant semiconductors |
| Author(s): | Kelly, J.J. (304829129)
Macht, L.J. (285602365)
Dorp, D.H. van
Kooijman, M.R.
Weyher, J.L. (305358316) |
| Publication year: | 2005 |
| Document type: | Article / Letter to editor |
| Journal: | Electrochemical Society Proceedings |
| ISSN: | 0161-6374 |
| Volume: | vol. 4 |
| Start page: | p. 138 |
| End page: | p. 146 |
| Subject: | Applied Materials Science |
| Organization: | Applied Materials Science |
| Appears in Collections: | Academic bibliography
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Please use this identifier to cite or link to this item:
http://hdl.handle.net/2066/32459
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